JPH062261Y2 - マウンドクラツシユ装置 - Google Patents
マウンドクラツシユ装置Info
- Publication number
- JPH062261Y2 JPH062261Y2 JP1986160323U JP16032386U JPH062261Y2 JP H062261 Y2 JPH062261 Y2 JP H062261Y2 JP 1986160323 U JP1986160323 U JP 1986160323U JP 16032386 U JP16032386 U JP 16032386U JP H062261 Y2 JPH062261 Y2 JP H062261Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- plate
- crush
- mound
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000001514 detection method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986160323U JPH062261Y2 (ja) | 1986-10-20 | 1986-10-20 | マウンドクラツシユ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986160323U JPH062261Y2 (ja) | 1986-10-20 | 1986-10-20 | マウンドクラツシユ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6365220U JPS6365220U (en]) | 1988-04-30 |
JPH062261Y2 true JPH062261Y2 (ja) | 1994-01-19 |
Family
ID=31085598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986160323U Expired - Lifetime JPH062261Y2 (ja) | 1986-10-20 | 1986-10-20 | マウンドクラツシユ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH062261Y2 (en]) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4339732B2 (ja) * | 2004-03-31 | 2009-10-07 | 株式会社タムラ製作所 | 精密研削装置および精密研削方法 |
JP5482994B2 (ja) * | 2009-09-09 | 2014-05-07 | キクカワエンタープライズ株式会社 | 加工材用板材の保持装置及びこれを用いた歪み材加工用テーブル |
CN118122903B (zh) * | 2024-05-08 | 2025-05-02 | 江天精密制造科技(苏州)有限公司 | 一种用于模具冲压的自锁防护机构 |
-
1986
- 1986-10-20 JP JP1986160323U patent/JPH062261Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6365220U (en]) | 1988-04-30 |
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